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2020 Annual Report
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Focusing on key components of high-end semiconductor equipment and supporting domestic production

Professor Hongguo ZHANG, who is in charge of the "Semiconductor Equipment Technology" project, was appointed as a JITRI project manager in 2018. The team made an in-depth investigation of the key components of semiconductor equipment in China, especially in Jiangsu Province, and submitted an industrial planning report and a business plan. The project team modified and improved the content of the project and focused it on key components of semiconductor equipment. By the end of 2020, the project founded a company in Nantong Central Innovation District to carry out R&D and commercialization. The company's main products include ion sources, lithographic light sources, and atomic layer deposition/etching (ALD/ALE) systems and components. It strives to become a champion enterprise of China's semiconductor components industry within five years.

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